In-line electron beam test system

An apparatus for testing electronic devices located on a large area substrate, comprising:

• a testing platform having a support surface for supporting a large area substrate;
• a prober coupled to the testing platform;
• and
• a plurality of testing columns coupled to the testing platform in a first linear direction, each of the plurality of testing columns having an optical axis within a test area, wherein the substrate is movable in a second linear direction that is orthogonal to the optical axis and the plurality of testing columns have a collective test area sufficient to test an entire width or an entire length of the substrate such that the testing columns are capable of testing the entire substrate as the substrate is moved in the linear direction through the apparatus.

A system for testing electronic devices located on a large area substrate, comprising:

• a testing platform;
• a substrate support disposed on the testing platform, the substrate support sized to receive a large area substrate;
• an end effector disposed within the substrate support adapted to move the substrate relative to the substrate support;
• a prober support coupled to the substrate support;
• and
• a plurality of testing devices coupled to an upper surface of the testing platform, each of the plurality of testing devices having a test area, wherein the plurality of testing devices are spaced to form a collective test area sufficient to test an entire length or an entire width of the substrate such that the testing devices are capable of testing the entire substrate as the substrate is moved in a single direction through the system.