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US 7,746,085 B2Granted
Micromechanical sensor having an analyzer circuit
AssigneeRobert Bosch GmbH
InventorsGerald Hopf, Oliver Kohn, Thomas Walker
Life of this patent
Estimating the term…
Abstract
A micromechanical sensor having an analyzer circuit and at least two detecting elements, each of the two detecting elements being connected to the analyzer circuit by at least one signal line. At least one signal line is connected to both detecting elements.
Claims6
A micromechanical sensor comprising:
- an electronic analyzer device;
- at least two detecting elements separate from the analyzer device, wherein each of the two detecting elements includes a moveable electrode, a first stationary electrode and a second stationary electrode;
- a first shared signal line connected to the first stationary electrode of each of the at least two detecting elements, the first shared signal line connecting the detecting elements in parallel to a plurality of bond pads on the analyzer device;
- and
- a second shared signal line connected to the second stationary electrode of each of the at least two detecting elements, the second shared signal line connecting the detecting elements in parallel to the bond pads on the analyzer device;
- wherein each moveable electrode is connected to the analyzer device by a dedicated, separate signal line.
3 more elements
Dependencies are inferred from the claim text.