Floating gate having multiple charge storing layers, method of fabricating the floating gate, non-volatile memory device using the same, and fabricating method thereof

A non-volatile memory device comprising:

• a substrate;
• a tunneling oxide film formed on the substrate;
• at least one polymer electrolytic film formed on the tunneling oxide film, the polymer electrolytic film defining an electrically charged upper surface;
• at least one charge trap layer formed of a plurality of metal nano-particles adsorbed on the electrically charged upper surface of the polymer electrolytic film;
• a control oxide film formed on an upper part of the charge trap layer;
• and
• a control gate formed on the control oxide film.

A non-volatile memory device comprising:

• a substrate;
• a tunneling oxide film formed on the substrate;
• at least one polymer electrolytic film formed on the tunneling oxide film, the polymer electrolytic film being charged;
• at least one charge trap layer made up of a number of metal nano-particles and adsorbed on an upper surface of the polymer electrolytic film;
• a control oxide film formed on an upper part of the charge trap layer;
• and
• a control gate formed on the control oxide film;
• a floating gate being formed by the at least one polymer electrolytic film and the at least one charge trap layer;
• wherein the floating gate is formed with a structure that includes sequentially formed poly(allylamine), poly(styrenesulfonate), poly(allylamine) layers, and said charge trap layer made of a number of gold nano-particles having negative charge.

A non-volatile memory device comprising:

• a semiconductor substrate;
• a tunneling oxide film formed on the semiconductor substrate;
• a floating gate formed on the tunneling oxide film to store charges selectively;
• a control oxide film formed on an upper part of the charge trap layer;
• and
• a control gate formed on the control oxide film,
• wherein the floating gate comprises:
• at least one stage of the polymer electrolytic film formed on the tunneling oxide film, the polymer electrolytic film defining an electrically charged upper surface to adsorb and support metal nano-particles;
• and,
• at least one charge trap layer including a plurality of metal nano-particles adsorbed on the electrically charged upper surface of each stage of the polymer electrolytic film.