Semiconductor device with contact stabilization between contact plugs and bit lines and method for manufacturing the same
AssigneeHynix Semiconductor Inc.
InventorDong Chul Koo
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AssigneeHynix Semiconductor Inc.
InventorDong Chul Koo
Estimating the term…
A semiconductor device includes a semiconductor substrate divided into a cell array region, a core region, and a peripheral region. Bit lines are formed in the respective regions. Storage node contact plugs are formed in the cell array region, and blocking patterns are simultaneously formed around the bit lines of the core region and the peripheral region. Capacitors are formed in the cell array region to come into contact with the storage node contact plugs, and metal contact plugs are formed to come into contact with the capacitors of the cell array region and the bit lines of the core region and the peripheral region. In the semiconductor device, even if the metal contact plugs are not aligned with the bit lines, the blocking pattern works to stabilize the contact between the metal contact plugs and the bit lines.
A semiconductor device comprising:
A method for manufacturing a semiconductor device, comprising the steps of:
Dependencies are inferred from the claim text.