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US 7,745,813 B2Granted
Nanostructures and methods for manufacturing the same
AssigneeQuNano AB
InventorsLars Ivar Samuelson, Bjorn Jonas Ohlsson
Life of this patent
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Abstract
A resonant tunneling diode, and other one dimensional electronic, photonic structures, and electromechanical MEMS devices, are formed as a heterostructure in a nanowhisker by forming length segments of the whisker with different materials having different band gaps.
Claims10
A layered structure comprising:
- a single crystal, epitaxial layer of a second crystalline material grown on a surface of a substrate of a first crystalline material, the second crystalline material being different from the first crystalline material;
- wherein:
- a plurality of nanowhiskers of the second crystalline material extend from the surface of the substrate in the epitaxial layer of the second crystalline material;
- the plurality of nanowhiskers constitute nucleation sites for the epitaxial layer of the second crystalline material;
- the entire epitaxial layer of the second crystalline material contains substantially no misfit dislocations, grain boundaries or antiphase domains;
- the plurality of nanowhiskers and the epitaxial layer of the second crystalline material comprise a same III-V semiconductor material;
- the surface of the substrate of the first crystalline material comprises silicon;
- the substrate comprises a crystalline silicon (100) substrate;
- and
- the surface of the substrate comprises a (111) silicon surface exposed in V-shaped grooves in the substrate.
7 more elements
A layered structure comprising:
- a single crystal, epitaxial layer of a second crystalline material grown on a surface of a substrate of a first crystalline material, the second crystalline material being different from the first crystalline material;
- wherein:
- a plurality of nanowhiskers of the second crystalline material extend from the surface of the substrate in the epitaxial layer of the second crystalline material;
- the plurality of nanowhiskers constitute nucleation sites for the epitaxial layer of the second crystalline material;
- the entire epitaxial layer of the second crystalline material contains substantially no misfit dislocations, grain boundaries or antiphase domains;
- the plurality of nanowhiskers and the epitaxial layer of the second crystalline material comprise a same III-V semiconductor material;
- the substrate of the first crystalline material comprises a crystalline silicon substrate;
- the substrate comprises a crystalline silicon (100) substrate;
- and
- the surface of the substrate comprises a (111) silicon surface exposed in V-shaped grooves in the substrate.
7 more elements
A structure comprising a plurality of crystalline III-V semiconductor nanowhiskers grown on a surface of a silicon substrate, wherein each entire nanowhisker of the plurality of nanowhiskers contains no misfit dislocations or antiphase domains,
- wherein:
- the substrate comprises a crystalline silicon (100) substrate;
- and
- the surface of the substrate comprises a (111) silicon surface exposed in V-shaped grooves in the substrate.
1 more element
Dependencies are inferred from the claim text.