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US 7,745,787 B2Granted
Electron beam device
AssigneeHitachi High-Technologies Corporation
InventorsChisato Kamiya, Masahiro Akatsu, Mitsugu Sato
Life of this patent
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Abstract
Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose. A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.
Claims6
An electron microscope, comprising:
- an accelerating electrode for accelerating a primary electron beam emitted from an electron source;
- an objective lens for focusing the accelerated primary electron beam on a specimen;
- a deflector for two-dimensionally scanning the primary electron beam over the specimen;
- a detector for detecting transmitted electrons transmitted through the specimen;
- and
- a display for displaying a specimen image using a signal from the detector, and
- wherein the detector is disposed at a position where, among the transmitted electrons transmitted through the specimen, transmitted electrons of a scattering angle of 100 mrad or above are detected when the acceleration voltage of the primary electron beam is 50 kV or below, and
- wherein the detector comprises a moving mechanism that is movable in an optical axis direction of the electron microscope.
5 more elements
Dependencies are inferred from the claim text.