Sample inspection method, sample inspection apparatus, and sample holder
AssigneeJEOL Ltd.
InventorHidetoshi Nishiyama
Life of this patent
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Abstract
A sample holder is offered which is used when a sample is inspected by irradiating the sample with a primary beam consisting of a charged-particle beam (such as an electron beam) via a film. Furthermore, method and apparatus for preventing destruction of the film due to a pressure difference by detecting damage to the film during inspection are offered.
Claims18
A method of inspecting a sample by irradiating the sample with a primary beam via a film and detecting a secondary signal produced from the sample in response to the irradiation,
- wherein information about the film obtained in response to the irradiation is monitored, and/or a dose of the primary beam impinging on the film is monitored.
A sample inspection apparatus having a film having a first surface on which a sample is held, a vacuum chamber for reducing the pressure of an ambient in contact with a second surface of the film, irradiation means connected with the vacuum chamber and irradiating the sample with a primary beam via the film, and signal detection means for detecting a secondary signal produced from the sample in response to the irradiation,
- wherein said apparatus further includes monitoring means for monitoring information about the film obtained in response to the irradiation and/or monitoring means for monitoring a dose of the primary beam impinging on the film.
A sample inspection apparatus having two films disposed opposite to each other such that a sample is held between mutually opposite surfaces of the films, a vacuum chamber for reducing the pressure of an ambient in contact with surfaces of the films facing away from said mutually opposite surfaces, irradiation means connected with the vacuum chamber and irradiating the sample with a primary beam via one of the two films, and signal detection means for detecting a secondary signal produced from the sample in response to the irradiation,
- wherein said apparatus further includes monitoring means for monitoring information about the film obtained in response to the irradiation and/or monitoring means for monitoring a dose of the primary beam impinging on the film.
A sample holder comprising:
- a film through which a charged-particle beam is transmitted, the film having a first surface on which a sample is placed in an open atmosphere, the sample holder permitting the sample to be irradiated with the charged-particle beam from a side of a second surface of the film via the film;
- and
- a fixing member mounted on the first surface of the film except for a sample-holding region of the first surface of the film, the fixing member holding the sample on the holding region.
A method of inspecting a sample comprising the steps of:
- preparing a sample holder comprising:
- a film through which a charged-particle beam is transmitted, the film having a first surface on which a sample is placed in an open atmosphere, the sample holder permitting the sample to be irradiated with the charged-particle beam from a side of a second surface of the film via the film;
- and
- a fixing member mounted on the first surface of the film except for a sample-holding region of the first surface of the film, the fixing member holding the sample on the holding region,
- placing the sample on said holding region of the sample holder;
- irradiating the sample with a charged-particle beam from a side of a second surface of the film forming the sample holder via the film;
- and
- detecting a secondary signal produced from the sample in response to the irradiation and obtaining information about the sample.
Dependencies are inferred from the claim text.