Method of substrate with transparent electrodes and devices incorporating it

A method of fabricating a substrate with transparent electrodes comprising a transparent substrate on which are structured electrodes of a transparent conductive oxide (TCO) of thickness e1 and of refractive index n1, wherein dielectric spaces between the electrodes are filled with a non-conductive transparent oxide (NCTO) of thickness e2 and of refractive index n2, wherein the method comprises the following steps:

• (a) placing the substrate, previously coated with a continuous film of transparent conductive oxide, in a closed enclosure having a window transparent to UV radiation, a gas inlet and an outlet from which a first gas is pumped;
• (b) effecting a first irradiation by a UV source through the window of the enclosure and through a first mask having portions transparent to UV radiation that correspond to the dielectric spaces, wherein characteristics of the UV radiation are adjusted as a function of a property and thickness of the transparent conductive oxide in order to eliminate the transparent conductive oxide in the irradiated areas and form the dielectric spaces;
• (c) introducing a precursor gas of the non-conductive transparent oxide into the enclosure and, using the same UV source and the same first mask, effecting a second irradiation with characteristics of the UV radiation adapted to a property of the non-conductive transparent oxide to produce a deposit of thickness e2 in the dielectric spaces;
• and
• (d) pumping out the precursor gas and removing the substrate with transparent electrodes from the enclosure.