Method for forming pixel structure of transflective liquid crystal display

A method for forming a pixel structure of a transflective liquid crystal display device, the pixel structure being formed on a substrate, the substrate having a pixel region, and the pixel region comprising a reflective region and a transmission region, the method comprising:

• forming a patterned semiconductor layer on the substrate;
• performing a first ion implantation process on parts of the patterned semiconductor layer to form a first doping region in the patterned semiconductor layer;
• forming a dielectric layer covering the patterned semiconductor layer on the substrate;
• forming a first patterned conductive layer on a surface of the dielectric layer, the first patterned conductive layer consisting of a transparent conductive layer and a first metal layer disposed on the transparent conductive layer, the first patterned conductive layer comprising a gate line, at least one gate electrode, a common line and a predetermined transparent pixel electrode structure disposed in the transmission region;
• performing a second ion implantation process on the patterned semiconductor layer to form a source region and a drain region on two opposite sides of the gate electrode respectively, and to form a doping interface between the drain region and the first doping region;
• forming an inter-layer dielectric (ILD) layer on the substrate;
• removing parts of the ILD layer to expose parts of the source region, the doping interface and the first metal layer of the predetermined transparent pixel electrode structure;
• forming a second conductive layer on the substrate to cover the ILD layer and to expose a surface of the first metal layer;
• and
• performing an etching process to remove parts of the second conductive layer and parts of the first metal layer in the transmission region simultaneously to form a data line and a reflective pixel electrode, to expose the transparent conductive layer of the predetermined transparent pixel electrode structure, and to form a transmission pixel electrode electrically connected to the reflective pixel electrode.