Polymer compound, positive resist composition and method of forming resist pattern
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakahiro Dazai, Takayoshi Mori, Hiroaki Shimizu, Kyoko Ohshita, Komei Hirahara
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakahiro Dazai, Takayoshi Mori, Hiroaki Shimizu, Kyoko Ohshita, Komei Hirahara
Estimating the term…
A polymer compound having a structural unit (a0) represented by a general formula (a0-1) shown below, and a structural unit (a1) that is derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group but is not classified as said structural unit (a0). [wherein, R represents a hydrogen atom, a lower alkyl group, or a halogenated lower alkyl group; A represents a divalent aliphatic cyclic group that may have a substituent; B represents a divalent hydrocarbon group that may have a substituent; r represents an integer of 0 or 1; and R1 represents an acid dissociable, dissolution inhibiting group]
A polymer compound, having a structural unit (a0) represented by a general formula (a0-1) shown below, and
A positive resist composition, comprising a resin component (A) that exhibits increased solubility in an alkali developing solution under action of acid, and an acid generator component (B) that generates acid upon exposure, wherein
Dependencies are inferred from the claim text.