Back to results
US 7,745,092 B2Granted
Multiple step printing methods for microbarcodes
AssigneeAffymetrix, Inc.
InventorRandall True
Life of this patent
Estimating the term…
Abstract
A method of forming a plurality of encoded microparticles with a lithography process to define codes for identifying the particles is disclosed herein.
Claims29
A method of forming a plurality of encoded microparticles comprising the steps of:
- (a) providing a planar substrate on which the encoded microparticles are to be formed;
- (b) providing a reticle having a reticle pattern;
- (c) exposing the substrate to light transmitted through the reticle, thereby printing a first portion of an encoding pattern onto the substrate;
- (d) moving the substrate in a lateral direction;
- (e) exposing the substrate to light transmitted through the reticle, thereby printing the reticle pattern onto the substrate;
- (f) optionally repeating steps (d) and (e) to create the encoding pattern;
- and
- (g) removing a portion of the remaining substrate to form the encoded microparticles.
5 more elements
A method of forming a plurality of encoded microparticles comprising the steps of:
- (a) providing a substrate on which the encoded microparticles are to be formed;
- (b) performing a first lithography step to print a first pattern on a substrate, wherein the pattern forms a first portion of an encoding pattern;
- (c) performing a second lithography step to print a second pattern on the substrate, wherein the second lithography step is performed at a lateral offset from the first lithography step, and wherein the second pattern forms a second portion of the encoding pattern;
- (d) optionally repeating a third lithography step at different lateral offsets to create the encoding pattern;
- and
- (e) removing a portion of the remaining substrate to form the encoded microparticles.
3 more elements
Dependencies are inferred from the claim text.