US 7,744,946 B2 · Organic siloxane resins and insulating film using the same

Abstract

The present invention relates to organic siloxane resins and insulating films using the same. The insulating films are manufactured by using organic siloxane resins, wherein organic siloxane resins are hydrolysis-condensation polymers of silane compounds comprising one or more kinds of hydrosilane compounds. They have superior mechanical properties and a low electric property, and therefore, are properly usable for highly integrated semiconductor devices.

Claims6

Dependent claims

Organic siloxane resins for insulation films having a dielectric constant in the range of 2.24 to 2.48 and a mechanical strength in the range of 6 to 8 GPa, which are condensed polymers, manufactured by a hydrolysis and condensation reaction of only hydrosilane compounds, wherein at least one hydrosilane compound has the following Chemical Formula 1;

HnSiR14−n [Chemical Formula 1]
wherein R1 is independently fluorine, aryl, vinyl, allyl, linear or branched alkyl having 1 to 4 carbon atoms, or alkoxy;
and n is an integer of 1 to 3.

Dependencies are inferred from the claim text.

Facts

Application

10/541,844Filed 16 Apr 2004

Priority

KR 10-2003-002440617 Apr 2003

Published

US 2006/0141163 A129 Jun 2006

Granted

29 Jun 2010

Term ends

Not estimatedThe source records don’t support an estimate.

Classification12 codes

C08G 77/12
Polysiloxanes: containing silicon bound to hydrogen
C08G 77/50
In which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms: by carbon linkages
C09D 183/04
Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing…:…
H10P 14/6342
Deposition processes: liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating

Organic siloxane resins and insulating film using the same

Life of this patent

Organic siloxane resins and insulating film using the same

Life of this patent

Abstract

Claims6