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US 7,744,697 B2Granted
Bulk monocrystalline gallium nitride
AssigneesNichia Corporation, Ammono Sp. z o.o.
InventorsRobert Tomasz Dwiliński, Roman Marek Doradziński, Jerzy Garczyński, Leszek Piotr Sierzputowski, Yasuo Kanbara
Life of this patent
Estimating the term…
Abstract
The present invention refers to an ammonobasic method for preparing a gallium-containing nitride crystal, in which gallium-containing feedstock is crystallized on at least one crystallization seed in the presence of an alkali metal-containing component in a supercritical nitrogen-containing solvent. The method can provide monocrystalline gallium-containing nitride crystals having a very high quality.
Claims14
An apparatus for recrystallizing a gallium-containing nitride crystal on a seed in a supercritical state of a nitrogen-containing solvent containing an alkali metal component, comprising:
- an autoclave having an internal space provided with a device which separates the internal space into two zones, wherein the device which separates the internal space comprises at least one baffle having at least one opening, the at least one opening in the at least one baffle includes at least one of a central opening and a circumferential opening for keeping the nitrogen-containing solvent convection between the two zones;
- a first heating device disposed on an outer surface of the autoclave in a position corresponding to an upper zone of the autoclave;
- a second heating device disposed on an outer surface of the autoclave in a position corresponding to a lower zone of the autoclave;
- a cooling device disposed on an outer surface of the autoclave in a position between said first heating device and said second heating device;
- at least one temperature control device for controlling said first heating device, said second heating device and said cooling device to make a temperature profile in the autoclave;
- wherein the upper zone of the autoclave, which has a feedstock for the gallium-containing nitride is provided as a dissolution zone, while the lower zone of the autoclave, which has at least one crystallization seed for the gallium-containing nitride is provided as crystallization zone,
- wherein said first heating device and said second heating device are separated so said first heating device and said second heating device are spaced apart from a position corresponding to the device which separates the internal space;
- and
- wherein the lower zone of the autoclave is controlled at a higher temperature than the upper zone of the autoclave by using the at least one temperature control device.
6 more elements
An apparatus for recrystallizing a gallium-containing nitride crystal on a seed in a supercritical state of a nitrogen-containing solvent containing an alkali metal component, comprising:
- an autoclave having an internal space provided with a device which separates the internal space into two zones, wherein the device which separates the internal space comprises at least one baffle having at least one opening, the at least one opening in the at least one baffle includes at least one of a central opening and a circumferential opening for keeping the nitrogen containing solvent convection between the two zones;
- a first heating device disposed on an outer surface of the autoclave in a position corresponding to an upper zone of the autoclave;
- a second heating device disposed on an outer surface of the autoclave in a position corresponding to a lower zone of the autoclave;
- a cooling device disposed on an outer surface of the autoclave in a position between said first heating device and said second heating device;
- at least one of temperature control device for controlling said first heating device, said second heating device and said cooling device to make a temperature profile in the autoclave;
- wherein the upper zone of the autoclave is provided as a dissolution zone where feedstock for the gallium-containing nitride is placed, while the lower zone of the autoclave is provided as crystallization zone where at least one crystallization seed for the gallium-containing nitride is placed;
- and
- wherein the lower zone of the autoclave is controlled at a higher temperature than the upper zone of the autoclave by using the heating device and the cooling device;
- wherein the temperature control device has an ability to make the upper zone of the autoclave controlled at a lower temperature than that of the lower zone according to a negative temperature coefficient of a solubility of the gallium-containing nitride crystal in the supercritical state of the nitrogen-containing solvent containing the alkali metal component.
6 more elements
An apparatus for recrystallizing a gallium-containing nitride crystal on a seed in a supercritical state of a nitrogen-containing solvent containing an alkali metal component, comprising:
- an autoclave having an internal space provided with a device which separates the internal space into two zones, wherein the device which separates the internal space comprises at least one baffle having an opening for keeping the nitrogen-containing solvent convection between the two zones;
- a first heating device disposed on an outer surface of the autoclave in a position corresponding to an upper zone of the autoclave;
- a second heating device disposed on an outer surface of the autoclave in a position corresponding to a lower zone of the autoclave;
- a cooling device disposed on an outer surface of the autoclave in a position between said first heating device and said second heating device;
- at least one temperature control device for controlling said first heating device, said second heating device and said cooling device to make a temperature profile in the autoclave;
- wherein the upper zone of the autoclave is provided as a dissolution zone where feedstock for the gallium-containing nitride is placed, while the lower zone of the autoclave is provided as crystallization zone where at least one crystallization seed for the gallium-containing nitride is placed.
3 more elements
Dependencies are inferred from the claim text.