Pattern transfer device and pattern transfer method
AssigneePioneer Corporation
InventorOsamu Kasono
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Abstract
An object is to transfer a concavo-convex pattern formed on the surface of a transfer die onto a transfer target accurately. A pattern transfer apparatus according to the present invention is one for putting a transfer die having a concavo-convex pattern against a transfer target on a substrate to transfer the concavo-convex pattern onto a surface of the transfer target. It is characterized by comprising pressing means for pressing the transfer die against the transfer target on the substrate at a plurality of different locations independently.
Claims8
A pattern transfer apparatus for putting a transfer die having a concavo-convex pattern against a transfer target on a substrate to transfer the concavo-convex pattern onto a surface of said transfer target, wherein at least part of said transfer die is made of a ferromagnetic material;
- the pattern transfer apparatus comprising:
- first pressing means for putting the transfer die onto the surface of said transfer target, said first pressing means including magnetic force generating means for generating a magnetic force and having at least two or more electromagnets which are provided to near said substrate;
- wherein said magnetic force generating means applies a magnetic force to said transfer die with said substrate interposed therebetween, thereby pressing said transfer die against said substrate,
- the pattern transfer apparatus further comprising second pressing means for pressing said transfer die against a transfer target on said substrate uniformly, wherein said second pressing means includes:
- pressure applying means;
- and a balloon for transmitting a pressure of said pressure applying means to said transfer die.
Dependencies are inferred from the claim text.