Thermal analysis apparatus
AssigneeSII NanoTechnology Inc.
InventorsKanji Nagasawa, Rintaro Nakatani
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AssigneeSII NanoTechnology Inc.
InventorsKanji Nagasawa, Rintaro Nakatani
Estimating the term…
A thermal analysis apparatus possesses a temperature sensor measuring a temperature of a heating furnace inside, a temperature program setter which can set a temperature program and outputs a temperature program signal, a temperature control section adjusting a supply electric power to a heater in compliance with a difference between the temperature program signal and a detection signal of the temperature sensor, a processor section calculating an air flow rate corresponding to a program temperature, and a mass flow controller which adjusts an air flow rate supplied to the heating furnace inside in compliance with a signal of the air flow rate calculated by the processor section. In the processor section, operation expressions calculating the air flow rate are set so as to differ respectively in a higher temperature side and a lower temperature side than a predetermined boundary temperature.
A thermal analysis apparatus comprising:
Dependencies are inferred from the claim text.