Manufacturing method for variable resistive element
AssigneeSharp Kabushiki Kaisha
InventorsYukio Tamai, Takuya Otabe
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AssigneeSharp Kabushiki Kaisha
InventorsYukio Tamai, Takuya Otabe
Estimating the term…
In the case where a variable resistive element, which is made of a variable resistor provided between a first and second electrodes, and of which the electrical resistance varies by applying a voltage pulse between the two electrodes, is applied to a resistance nonvolatile memory, there is a range of the resistance value of the variable resistive element in a low resistance state where the nonvolatile memory can operate normally. In the conventional manufacturing method the resistance value of the variable resistive element is too low, therefore, it can not be controlled within a desired range of the resistance value. A step of carrying out of a reduction process is provided at any point after the step of forming a variable resistor material as a film, it has thereby become possible to increase the resistance value of the variable resistive element, which is too low in the conventional method.
A manufacturing method for a variable resistive element comprising a variable resistor comprising a variable resistor material provided between a first electrode comprising a first electrode material and a second electrode comprising a second electrode material, the electrical resistance of the variable resistor being variable between a low resistance value and a high resistance value by applying a voltage pulse between the first electrode and the second electrode, said method comprising:
Dependencies are inferred from the claim text.