Spectral purity filters and methods therefor
AssigneeCymer, Inc.
InventorsAlexander N. Bykanov, Igor V. Fomenkov
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Abstract
A spectral purity filter arrangement is disclosed. The spectral purity filter arrangement includes a film configured for filtering out at least a portion of input light and a support structure coupled to the film along at least one edge of the film. The spectral purity filter arrangement further includes a gas control subsystem configured to direct a gas at the film to support the film at least when the film is disposed in an operational position to perform the filtering.
Claims20
A spectral purity filter arrangement comprising:
- a film configured for filtering out at least a portion of input light;
- a support structure coupled to said film along at least one edge of said film;
- and
- at least a first gas port configured to furnish a gas to provide gas flow support for said film at least when said film is disposed in an operational position to perform said filtering.
A method for implementing spectral purity filtering in a lithography system, comprising:
- providing a spectral purity filter arrangement comprising:
- providing a film and a support structure, said film configured for filtering out at least a portion of input light and coupled to said support structure along at least one edge of said film;
- and
- providing a gas configured to provide gas flow support for said film al least when said film is disposed in an operational position to perform said filtering.
An ultraviolet (UV) lithography system configured for processing substrates, comprising:
- a spectral purity filter film configured for filtering out at least a portion of out-of-band light;
- a support structure coupled to said spectral purity filter film along at least one edge of said spectral purity filter film;
- and
- means for providing a gas to create gas flow support for said spectral purity filter film at least when said spectral purity filter film is disposed in an operational position to perform said filtering.
Dependencies are inferred from the claim text.