Process for structuring at least one year as well as electrical component with structures from the layer
AssigneeOSRAM Opto Semiconductors GmbH
InventorsMaja Hackenberger, Johannes Voelkl, Roland Zeisel
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AssigneeOSRAM Opto Semiconductors GmbH
InventorsMaja Hackenberger, Johannes Voelkl, Roland Zeisel
Estimating the term…
A process for structuring at least one layer as well as an electrical component with structures from the layer are described. The invention states a process to generate at least one structured layer (10A), wherein a mask structure (20) with a first (20A) and second structure (20B) is generated on a layer (10) which is present on a substrate (5). Through this mask structure (20), the first layer (20A) is transferred onto the layer (10) using isotropic structuring processes, and the second structure (20B) is transferred onto the layer (10) using anisotropic structuring processes. The process as per the invention permits the generation of two structures (20A, 20B) in at least a single layer while using a single mask structure.
A process for generating a structured component, comprising:
An electrical component formed as a surface wave component, comprising:
Dependencies are inferred from the claim text.