US 7,735,055 B2Granted

Method of creating photo mask data, method of photo mask manufacturing, and method of manufacturing semiconductor device

AssigneeKabushiki Kaisha Toshiba

InventorsTomohiro Tsutsui, Osamu Ikenaga

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Abstract

A method of creating photo mask data includes preparing design data of a photo mask, generating drawing data of the photo mask by using the design data, generating inspection control information configured to control inspection of defect on the photo mask by using the drawing data, and generating drawing and inspection data including the drawing data and the inspection control information by providing the drawing data with the inspection control information.

Claims4

Dependent claims

A method of manufacturing a photo mask, the photo mask comprising a transparent substrate which transmits light, a light shielding pattern provided on the transparent substrate and shielding the light, and a translucent pattern provided on a region including a part of the light shielding pattern and transmitting part of the light, the method comprising:

creating photo mask data including drawing and inspection data by a method of creating photo mask data, wherein the method
of creating photo mask data comprises:
preparing design data of the photo mask;
generating drawing data of the photo mask by using the design data;
generating inspection control information configured to control inspection of defects on the photo mask by using the drawing data, the inspection control information corn rising information for inspecting a part of an inspection region on the photo mask in a different manner from other regions of the inspection region;
and
generating an item of drawing and inspection data representing the drawing data and the inspection control information by providing the drawing data with the inspection control information;
forming a pattern including a light shielding pattern and a translucent pattern on a transparent substrate, on a basis of the drawing and inspection data;
and
inspecting the pattern on the basis of the drawing and inspection data by reflection-type inspection, wherein:
generating the inspection control information includes generating a first range information and a first inspection sensitivity relating to a range of a region including a laminated structure formed by laminating the transparent substrate the light shielding pattern and the translucent pattern, and a second range information and a second inspection sensitivity lower than the first inspection sensitivity relating to a range of a region not including the laminated structure, on a basis of the drawing data;
and
generating the drawing and in section data includes providing the drawing data with the first range information, the first inspection sensitivity, the second range information, and the second inspection sensitivity.

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Dependencies are inferred from the claim text.

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Abstract

creating photo mask data including drawing and inspection data by a method of creating photo mask data, wherein the method
of creating photo mask data comprises:
preparing design data of the photo mask;
generating drawing data of the photo mask by using the design data;
generating inspection control information configured to control inspection of defects on the photo mask by using the drawing data, the inspection control information corn rising information for inspecting a part of an inspection region on the photo mask in a different manner from other regions of the inspection region;
and
generating an item of drawing and inspection data representing the drawing data and the inspection control information by providing the drawing data with the inspection control information;
forming a pattern including a light shielding pattern and a translucent pattern on a transparent substrate, on a basis of the drawing and inspection data;
and
inspecting the pattern on the basis of the drawing and inspection data by reflection-type inspection, wherein:
generating the inspection control information includes generating a first range information and a first inspection sensitivity relating to a range of a region including a laminated structure formed by laminating the transparent substrate the light shielding pattern and the translucent pattern, and a second range information and a second inspection sensitivity lower than the first inspection sensitivity relating to a range of a region not including the laminated structure, on a basis of the drawing data;
and
generating the drawing and in section data includes providing the drawing data with the first range information, the first inspection sensitivity, the second range information, and the second inspection sensitivity.

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