Method and device for electrostatic fixing of substrates with polarized molecules
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
InventorChristof Landesberger
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Abstract
Method for handling a substrate with polarizable molecules including providing a carrier with a first junction electrode and disposing the substrate between the first junction electrode and a second junction electrode. Fixing the substrate on the carrier is achieved by applying a voltage between the first junction electrode and the second junction electrode, so that the polarizable molecules are polarized. After removing the second junction electrode, the substrate remains fixed on the carrier.
Claims11
A method for handling an electrically insulating solid substrate comprising polarizable molecules, comprising:
- providing a carrier comprising a first junction electrode;
- disposing the electrically insulating solid substrate between the first junction electrode and a second junction electrode, and applying a voltage between the first junction electrode and the second junction electrode, so that the polarizable molecules are polarized and the electrically insulating solid substrate is thereby fixed on the carrier;
- and
- removing the second junction electrode, wherein the substrate remains fixed on the carrier.
A device for handling a substrate comprising polarizable molecules, comprising:
- a carrier with a first junction electrode;
- a second junction electrode, wherein the first junction electrode and the second junction electrode are formed such that the substrate may be placed therebetween and the second junction electrode is formed as a foil electrode;
- and
- a unit for applying such a voltage between the first junction electrode and the second junction electrode that the polarizable molecules are thereby polarizable and the substrate is thereby fixed on the carrier;
- and
- a remover for removing the second junction electrode.
Dependencies are inferred from the claim text.