Ultraviolet light monitoring system
AssigneeOki Semiconductor Co., Ltd.
InventorsJun Hashimoto, Shinji Kawada, Ikuo Kurachi, Seiji Samukawa
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Abstract
An ultraviolet light monitoring system includes first and second electrodes, an evaluation subject film and a power source. The first and second electrodes are opposingly disposed and attract holes which are generated in accordance with irradiation of ultraviolet light. The evaluation subject film is formed in a vicinity of the first and second electrodes, and is a subject of evaluation of damage caused by the irradiation of ultraviolet light. The power source, at times of monitoring of the ultraviolet light, applies a predetermined bias to a series path formed by the first electrode, a gap between the first and second electrodes, and the second electrode.
Claims11
An ultraviolet light monitoring system comprising:
- first and second electrodes that are opposingly disposed and that attract holes which are generated in accordance with irradiation of ultraviolet light;
- an evaluation subject film that is formed in a vicinity of the first and second electrodes and that is a subject of evaluation of damage caused by the irradiation of the ultraviolet light;
- and
- a power source that, at a time of monitoring of the ultraviolet light, applies a predetermined bias to a series path formed by the first electrode, a gap between the first and second electrodes, and the second electrode.
Dependencies are inferred from the claim text.