US 7,732,287 B2Granted

Method of forming a body-tie

AssigneeHoneywell International Inc.

InventorsPaul S. Fechner, Gordon A. Shaw, Eric E. Vogt

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Abstract

A method of forming a body-tie. The method includes forming the body-tie during an STI scheme of an SOI process. During the STI scheme, a first trench is formed. The first trench stops before a buried oxide layer of the SOI substrate. The first trench may determine a height of body tie that is shared between at least two FETs. A second trench may also be formed within the first trench. The second trench stops in the SOI substrate. The second trench defines the location and shape of a body-tie. Once the location and shape of the body-tie are defined, an oxide is deposited above the body-tie. The deposited oxide prevents certain implants from entering the body tie. By preventing these implants, a source and a drain implant may be self-aligned to the source and drain areas without requiring the use of the photoresist mask to shield the body tie regions from the source and drain implant.

Claims14

Dependent claims

A method of forming a body-tie, the method comprising:

etching a first trench into a device layer of a Silicon-On-Insulator (SOI) substrate, wherein the first trench stops short of art insulating layer of the SOI substrate, and wherein the device layer underlies an STI stack comprising at least a nitride layer and an oxide layer covering the nitride layer;
masking a portion of the first trench with a mask that establishes a location of the body-tie;
etching a second trench into an unmasked portion of the first trench, wherein the second trench extends to the insulating layer, and wherein the nitride layer is not thinned by the etching of the second trench;
forming a Shallow Trench Isolation (STI) oxide above the first and second trenches;
doping drain and source regions of the device layer at a first doping density having a first average depth from a top surface of the device layer, the first average depth being less than a thickness of the STI oxide above the first trench;
and
doping the drain and the source regions at a second doping density having a second average depth from the top surface of the device layer, the second average depth being greater than a thickness of the STI oxide above the first trench and having a doping density that is less than a doping density of the body-tie, thereby preventing the body-tie from switching majority carrier type.

4 more elements

A method of forming a body-tie, the method comprising:

providing a silicon layer located on top of a silicon dioxide layer;
providing at least a nitride layer on top of the silicon layer;
providing an oxide layer on top of the nitride layer;
and
etching a multi-tiered trench into the silicon layer and forming a silicon island, wherein the multi-tiered trench i) establishes a location of the body-tie ii) provides electrical isolation by extending to the silicon dioxide layer;
and iii) includes at least first and second trenches, wherein the first trench stops short of the silicon dioxide layer and the second trench extends to the silicon dioxide layer, and wherein the nitride layer is not thinned by the etching that extends to the silicon dioxide layer;
forming a Shallow Trench Isolation (STI) oxide above the first and second trenches;
doping drain and source regions of the silicon island at a first doping density having a first average depth from a top surface of the silicon island, the first average depth being less than a thickness of the STI oxide above the trench;
and
doping the drain and the source regions at a second doping density having a second average depth from the top surface of the silicon island, the second average depth being greater than a thickness of the STI oxide above the first trench and having a doping density that is less than a doping density of the body-tie, thereby preventing the body-tie from switching majority carrier type.

7 more elements

Dependencies are inferred from the claim text.