Scanning probe microscope
AssigneeShimadzu Corporation
InventorsTakeshi Ito, Masahiro Ota
Life of this patent
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Abstract
A scanning probe microscope scans the surface of a sample while making a cantilever to which an exploratory needle is attached oscillate near its resonance point, and collects information on the surface of the sample based on the change of oscillation due to the interaction between the surface of the sample and the exploratory needle. The scanning probe microscope includes a plurality of oscillators attached to the cantilever for oscillating the cantilever, and an oscillator drive device connected to the oscillators for selectively applying an alternating voltage for excitation to the plurality of oscillators.
Claims7
A scanning probe microscope for scanning a surface of a sample and collecting information on the surface of the sample based on a change of oscillation, comprising:
- a cantilever having an exploratory needle;
- a plurality of oscillators attached to the cantilever for oscillating the cantilever;
- and
- an oscillator drive device connected to the oscillators for selectively applying an alternating voltage for exciting the plurality of oscillators,
- wherein said plurality of oscillators are arranged so that distances of said plurality of oscillators relative to the cantilever are different.
A scanning probe microscope for scanning a surface of a sample and collecting information on the surface of the sample based on a change of oscillation, comprising:
- a cantilever having an exploratory needle;
- an oscillator attached to the cantilever for oscillating the cantilever and having two electrodes;
- and
- an oscillator drive device connected to the electrodes of the oscillator, said oscillator drive device applying an alternating voltage for exciting with a predetermined frequency one of the electrodes, and an alternating voltage with a same frequency as the alternating voltage and an adjustable phase to the other electrode.
Dependencies are inferred from the claim text.