Cooling station lifter pins
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChao-Hsiang Fan, Te-Hsiang Liu, Chun-Kuang Liu
Life of this patent
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Abstract
In a cooling station having lifter pins positioned within respective sockets, the lifter pins being positioned for translational movement within platform openings, the improvement comprising forming the lifter pins of aluminum or polymer. A cooling station comprising a cooling station body, a series of sockets affixed to the cooling station body a respective series of lifter pins comprised of aluminum or polymer affixed to the series of sockets, and an platform positioned on the cooling station body. The platform having respective openings positioned above the series of sockets and lifter pins for translational movement of the lifter pins into the platform openings.
Claims16
In a cooling station having lifter pins positioned within respective sockets, wherein the respective sockets each have a center, the improvement comprising:
- fixedly attaching the lifter pins within the respective sockets at an eccentricity from the center of the respective sockets, forming the lifter pins of aluminum or polymer, wherein the respective sockets are configured to be attached to the cooling station body and be selectively rotatable.
A cooling station, comprising:
- a cooling station body;
- a series of sockets affixed to the cooling station body;
- a respective series of lifter pins affixed to the series of sockets, the lifter pins being comprised of aluminum or polymer, wherein the lifter pins are fixedly affixed to the respective sockets;
- and
- a platform positioned on the cooling station body, the platform having respective openings positioned above the series of sockets and lifter pins for translational movement of the lifter pins into the platform openings.
A cooling station, comprising:
- a cooling station body;
- a series of sockets affixed to the cooling station body;
- a respective series of lifter pins fixedly affixed to the series of sockets;
- the lifter pins being comprised of aluminum or polymer;
- the lifter pins and the respective sockets comprising unitary structures;
- and a platform positioned on the cooling station body;
- the platform having respective openings positioned above the series of sockets and lifter pins for translational movement of the lifter pins into the platform openings.
Dependencies are inferred from the claim text.