Micro-mechanical structure and method for manufacturing the same
AssigneeElectronics and Telecommunications Research Institute
InventorsWoo Seok Yang, Sung Weon Kang, Youn Tae Kim
Life of this patent
Estimating the term…
Abstract
Provided is a micro-mechanical structure and method for manufacturing the same, including a hydrophilic surface on at least a part of a surface of the micro-mechanical structure, so as to prevent generation of an adhesion phenomenon in the process of removing a sacrificial layer to release the micro-mechanical, wherein the sacrificial layer comes into contact with the surface of the micro-mechanical structure.
Claims16
A micro-mechanical structure released by removing a sacrificial layer, comprising:
- a first side portion fixed on one region of an upper surface of a base structure;
- and
- a second side portion released by removal of the sacrificial layer, the second side portion having an opposite surface to the upper surface, wherein the upper surface and the opposite surface include at least a hydrophilic surface to maintain a contact angle of water produced during removal of the sacrificial layer to be less than 90°, and to prevent the produced water from building up a water bridge which causes adhesion of the micro-mechanical structure.
A method for manufacturing a micro-mechanical structure, comprising:
- providing a base structure having an upper surface;
- forming a sacrificial layer on the base structure;
- forming the micro-mechanical structure having a first side portion fixed on an upper surface of the base structure, and a second side portion to be released by removing the sacrificial layer, the second side portion having an opposite surface opposite to the upper surface;
- and
- releasing the micro-mechanical by removing the sacrificial layer, wherein the sacrificial layer is removed by etching in such a way that a contact angle of water produced during removal of the sacrificial layer is less than 90° on surfaces of the base structure and the micro-mechanical structure, and that the produced water does not build up a water bridge which causes adhesion of the micro-mechanical structure.
A micro-mechanical structure released by removing a sacrificial layer, comprising:
- a first side portion fixed on an upper surface of a base structure;
- and
- a second side portion released by removing the sacrificial layer, the second side portion having an opposite surface opposite to the upper surface, wherein at least one of the upper surface and the opposite surface further includes a hydrophilic layer formed of any one selected from the group consisting of aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), cobalt (Co).
Dependencies are inferred from the claim text.