Pump ring
AssigneeUnited Microelectronics Corp.
InventorsJian-Shing Lai, Ying-Yi Chang
Life of this patent
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Abstract
A pump ring. The pump ring is suitable for a reaction chamber and capable for extracting gas from the reaction chamber in a uniform gas flow rate. The pump ring comprises a ring body and a top ring part located on the ring body. The top ring part is apart from an inner wall of the reaction chamber with a fixed distance. Therefore, a gas-extraction path composed of the reaction chamber, the ring body and the top ring part is unobstructed. Hence, the turbulence flow of the extracted gas can be efficiently suppressed and the problems of the accumulation of the impurities and reaction chamber contamination can be solved.
Claims6
A pump ring for a reaction chamber, wherein an inner wall of the reaction chamber possesses a plurality of protrusions, the pump ring comprising:
- a ring-shaped body disposed in the reaction chamber;
- and
- a top ring-shaped part located on the ring-shaped body, wherein a outer peripheral sidewall of the top ring-shaped part is opposite to the inner wall of the reaction chamber, and a plurality of recessions are located on the outer peripheral sidewall of the top ring-shaped part without penetrating through the top ring-shaped part and the recessions are configured to be opposite to the protrusions on the inner wall of the reaction chamber respectively and a protrudent profile of each of the protrusions is conformal to a concave profile of the corresponding recession so that the top ring-shaped part is apart from the protrusions on the inner wall of the reaction chamber with a distance.
Dependencies are inferred from the claim text.