Lid unit thin plate supporting container
AssigneeMiraial Co., Ltd.
InventorsChiaki Matsutori, Tadahiro Obayashi, Takaharu Oyama
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AssigneeMiraial Co., Ltd.
InventorsChiaki Matsutori, Tadahiro Obayashi, Takaharu Oyama
Estimating the term…
The present invention is directed to a lid unit having a latching mechanism for firmly fixing the lid unit to a container body for containing semiconductor wafers and the like, which latching mechanism can be easily disassembled for cleaning and drying of its components, and to a wafer presser for retaining the semiconductor wafers in position when the container is shaken. The latching mechanism includes a locking member which, when projected, secures the lid unit to the container body; an actuator for moving the locking member between projected and retracted positions; a tip-side cam for pressing a tip portion of the locking member in one direction relative to the lid unit when the locking member is projected by the actuator; a base-end lower cam for pressing a base-end of the locking member in a second direction, opposite the one direction; and a base-end upper cam and a cam projection follower for pressing the base-end in the second direction. The wafer presser is supported by a supporting projection bar formed with its ends thinner than its center portion.
A lid unit for closing a container body of a portable thin plate supporting container in which a plurality of thin plates are housed, said lid unit comprising:
Dependencies are inferred from the claim text.