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US 7,718,352 B2Granted
Process for producing electroluminescent element
AssigneeDai Nippon Printing Co., Ltd.
InventorsTomoyuki Tachikawa, Norihito Itoh, Keisuke Hashimoto
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Abstract
There is provided a process for producing an EL element by photolithography, which process can produce an EL element having improved luminescence efficiency. The production process comprises the steps of removing a photoresist from photoresist layer-covered parts of an electroluminescent layer and cleaning the surface of the electroluminescent layer parts from which the photoresist has been removed.
Claims8
A process for producing an electroluminescent element comprising a patterned electroluminescent layer, said process comprising the steps of:
- forming an electroluminescent layer on a substrate having at least an electrode layer formed thereon;
- covering a photoresist layer on said electroluminescent layer;
- exposing said photoresist layer through a photomask and developing the exposed photoresist layer to pattern the photoresist layer;
- removing the electroluminescent layer in its areas, which are exposed on the surface of the assembly and are not covered with the photoresist layer as a result of said patterning of the photoresist layer, to pattern said electroluminescent layer;
- removing the remaining photoresist on the electroluminescent layer covered with said photoresist layer;
- and
- further removing the surface layer part of the electroluminescent layer from which said photoresist has been removed.
4 more elements
Dependencies are inferred from the claim text.