Remote center compliant flexure device
AssigneeBoard of Regents, The University of Texas System
InventorsByung-Jin Choi, Sidigata V. Sreenivasan, Stephen C. Johnson
Life of this patent
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Abstract
An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system to move about a plurality of axes. An actuation system is coupled to the flexure system to selectively constrain movement of the body along a subset of the plurality of axes.
Claims18
A method for separating a template from a substrate, the template and the substrate having a template-substrate interface, comprising:
- generating tilting motion about a tilting axis located at the template-substrate interface;
- and,
- applying a force to increase a distance between the template and the substrate such that the template is spaced apart from the substrate.
A method for separating a template from a substrate, comprising:
- curing a liquid positioned between the template and the substrate, the cured liquid resulting in an imprinted layer;
- applying a first force to induce a tilting motion at an interface between the template and the substrate;
- and,
- applying a second force in a Z-direction to increase a distance between the template and the substrate.
A method for separating a template and a transfer layer positioned on a substrate, comprising:
- applying a peeling force to the template by generating a tilting motion about an axis located between the template and the substrate;
- and,
- applying a pulling force to the template in the Z-direction to increase a distance between the template and the substrate.
Dependencies are inferred from the claim text.