Scanning probe apparatus
AssigneeCanon Kabushiki Kaisha
InventorsSusumu Yasuda, Junichi Seki, Takao Kusaka, Nobuki Yoshimatsu
Life of this patent
Estimating the term…
Abstract
A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a drive circuit for driving the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.
Claims11
A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and said scanning probe apparatus, said apparatus comprising:
- a probe;
- and
- a scanning stage comprising a drive element for moving a sample holding table for holding the sample, a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled, and a drive circuit for driving said scanning stage,
- wherein said scanning stage is configured so that the drive element, the movable portion, and the drive circuit for driving said scanning stage are detachably or replaceably mountable together with said scanning stage as a unit to a main assembly of said scanning probe apparatus.
A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and said scanning probe apparatus, said apparatus comprising:
- a probe drive stage comprising a drive element for moving a probe holding table, a movable portion movable in a direction in which an inertial force generated during movement of the probe holding table is cancelled, and a drive circuit for driving said probe drive stage;
- and
- a scanning stage for holding a sample,
- wherein said probe drive stage is configured so that the drive element, the movable portion, and the drive circuit for driving said probe drive stage are detachably or replaceably mountable together with said probe drive stage as a unit to a main assembly of said scanning probe apparatus.
A stage for moving a probe or a sample, and provided for a scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the scanning probe apparatus, said stage comprising:
- a drive element for moving the probe or the sample;
- a movable portion movable in a direction in which an inertial force generated during movement of the probe or the sample is cancelled;
- and
- a drive circuit for driving said stage,
- wherein said stage is configured so that the drive element, the movable portion, and the drive circuit for driving said stage are detachably or replaceably mountable together with said stage as a unit to a main assembly of said scanning probe apparatus.
Dependencies are inferred from the claim text.