Resist composition and method for forming resist pattern
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsHideo Hada, Masaru Takeshita, Ryotaro Hayashi, Syogo Matsumaru, Taku Hirayama, Hiroaki Shimizu
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsHideo Hada, Masaru Takeshita, Ryotaro Hayashi, Syogo Matsumaru, Taku Hirayama, Hiroaki Shimizu
Estimating the term…
A resist composition is provided that yields fine resolution, and improved levels of line edge roughness and depth of focus. This composition includes a resin component (A) that undergoes a change in alkali solubility under the action of acid, and an acid generator component (B) that generates acid on exposure, wherein the component (A) is a resin with a weight average molecular weight of no more than 8,000 containing structural units (a) derived from a (meth)acrylate ester, and the component (B) includes at least one sulfonium compound represented by a general formula (b-1) or a general formula (b-2) shown below.
A resist composition comprising a resin component (A) that undergoes a change in alkali solubility in the presence of acid, and an acid generator component (B) that generates acid on exposure, wherein:
A resist composition, comprising a resin component (A) that undergoes a change in alkali solubility in the presence of acid, and an acid generator component (B) that generates acid on exposure, wherein
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