Device for storing and/or transporting plate-shaped substrates in the manufacture of electronic components
AssigneeTec-Sem AG
InventorsJakob Blattner, Rudy Federici
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AssigneeTec-Sem AG
InventorsJakob Blattner, Rudy Federici
Estimating the term…
To make possible a tightly packed, essentially horizontal storage of wafers (40), in which a simplified access to each of these wafers (40) is possible, a device is provided having a plurality of superimposed storage elements (10). The storage elements (10) have device features (16) for depositing the wafers (40). The storage elements (10) have projections (14) for lifting, whereby a specific storage element (10a) as well as all storage elements (10) arranged above this specific storage element (10a) can be lifted by a predetermined first height for producing a contact gap. The projections (14) can also be used to lift the storage element (10b) arranged below the said storage element (10a) by a predetermined second height for producing a freedom of access.
A device for storing plate-shaped substrates the device comprising:
A device for storing plate-shaped substrates the device comprising:
Dependencies are inferred from the claim text.