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US 7,679,880 B2Granted
Electrostatic chuck and manufacturing method thereof
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHideki Fujii, Waichi Yamamura
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHideki Fujii, Waichi Yamamura
Estimating the term…
The invention provides an electrostatic chuck in which a workpiece-chucking surface is made flat. An electrostatic chuck with a built-in electric heating means comprises a base plate formed of carbon or a carbon-based composite material and, successively formed on one surface of the base plate, an insulating layer (a1), an electroconductive layer (a2) to serve as a chucking electrode and an dielectric layer (a3) to form a workpiece-chucking surface and, successively formed on the other surface of the base plate, an insulating layer (b1) and an electroconductive layer (b2) to serve as an electric heater element, the electrostatic chuck improved in that the workpiece-chucking surface of the electrostatic chuck and an opposite surface thereof are warped to have a relationship selected from concavo-convex and convexo-concave, and in that the warping of the surfaces is in a manner such that the workpiece-chucking surface of the dielectric layer is rendered flat when the opposite surface of the electrostatic chuck is fastened to a machine.
An electrostatic chuck (1) with a built-in electric heating means comprising a base plate (2) formed of carbon or a carbon-based composite material and, successively formed on one surface of the base plate (2), an insulating layer (3) an electroconductive layer (4) to serve as a chucking electrode and a dielectric layer ((6)) to form a workpiece-chucking surface and, successively formed on the other surface of the base plate (2), an insulating layer (3) and an electroconductive layer (5) to serve as an electric heater element, said electrostatic chuck being improved in that said workpiece-chucking surface of the electrostatic chuck and an opposite surface thereto are warped to have a relationship selected from concavo-convex and convexo-concave, and in that the warping of said surfaces is in a manner such that the workpiece-chucking surface of the dielectric layer is rendered flat when said opposite surface of the electrostatic chuck is fixed flat to an apparatus without a help of heat.
Dependencies are inferred from the claim text.