Exposure apparatus and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorMakoto Nomoto
Life of this patent
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Abstract
An exposure apparatus having an element to be cooled and which exposes a substrate to patterned radiation by using the element. A reservoir houses a liquid coolant therein. A first pump disposed between the reservoir and the element supplies the coolant from the reservoir to the element. A heater disposed between the first pump and the element heats the coolant supplied from the first pump. A jacket receives the coolant from the heater and cools the element. A second pump disposed between the jacket and the reservoir supplies the coolant from the jacket to the reservoir. A cooler disposed between the second pump and the reservoir cools the coolant supplied from the second pump, and a valve is disposed between the second pump and the cooler for controlling the supply of the coolant.
Claims9
An exposure apparatus having an element to be cooled and being configured to expose a substrate to patterned radiation by using the element, said apparatus comprising:
- a reservoir configured to house a liquid coolant therein;
- a first pump disposed between said reservoir and the element and configured to supply the coolant from said reservoir to the element;
- a heater disposed between said first pump and the element and configured to heat the coolant supplied from said first pump;
- a jacket configured to receive the coolant from said heater and to cool the element;
- a second pump disposed between said jacket and said reservoir and configured to supply the coolant from said jacket to said reservoir;
- a cooler disposed between said second pump and said reservoir and configured to cool the coolant supplied from said second pump;
- and
- a valve disposed between said second pump and said cooler to control the supply of the coolant.
An exposure apparatus having an element to be cooled and being configured to expose a substrate to patterned radiation by using the element, said apparatus comprising:
- a reservoir configured to house a liquid coolant therein;
- a first pump disposed between said reservoir and the element and configured to supply the coolant from said reservoir to the element;
- a heater disposed between said first pump and the element and configured to heat the coolant supplied from said first pump;
- a jacket configured to receive the coolant from said heater and to cool the element;
- a second pump disposed between said jacket and said reservoir and configured to supply the coolant from said jacket to said reservoir;
- a cooler disposed between said second pump and said reservoir and configured to cool the coolant supplied from said second pump;
- a valve disposed between said second pump and said cooler to control the supply of the coolant;
- and
- a pressure sensor disposed between the element and said second pump and configured to detect a pressure of the coolant, wherein a revolution speed of said second pump is adjusted on the basis of an output of said pressure sensor.
Dependencies are inferred from the claim text.