Method of forming epitaxial SiC using XPS characterization

A method of producing a semiconductor material comprising:

• heating a SiC substrate having an axis tilted toward a [11-20] direction by 1° or more in a carbon-containing atmosphere;
• forming a carbon-rich surface on the SiC substrate such that the SiC substrate includes carbon atoms which are not related to binding in SiC on the carbon-rich surface of the substrate, wherein the carbon-rich surface includes different ratios R of integrated intensity of a signal having a peak at a binding energy relating to stoichiometric SiC and an integrated intensity of a signal having a peak at a binding energy relating to carbon other than the signal relating to stoichiometric SiC;
• measuring the different ratios R;
• controlling the different ratios R by selecting a degree of a carbonaceous gas to be added to a carrier gas, a degree of carbon released from carbon products, a temperature for a heating process, and a time length of the heating process;
• and growing SiC crystal epitaxially on the SiC substrate.