Film forming apparatus, substrate for forming oxide thin film and production method thereof

A method of producing an oxide thin film forming substrate, comprising:

• forming a first electrode thin film including at least one of Pt, Ir and Ru on a substrate disposed on a substrate holder at a substrate temperature ranging from room temperature to 650° C. by sputtering from a sputtering source;
• heating the substrate when the substrate is subjected to sputtering film forming;
• forming a second electrode thin film including at least one of Pt, Ir and Ru on the first electrode thin film at substrate temperature not exceeding 350° C. by vapor deposition from a vapor deposition source, the sputtering source and the vapor deposition source positioned such that one of the sources is above the substrate and the other of the sources is below the substrate;
• cooling the substrate when the substrate is subjected to vapor deposition film forming;
• and
• rotating the substrate to sequentially perform the step of forming the first electrode thin film and the step of forming the second electrode thin film and so that the substrate only faces one of the sources at a time in the chamber,
• wherein the step of rotating positions the substrate and the substrate holder such that the substrate holder provides line of sight visibility to only one of the deposition sources at a time.