Back to results
US 7,677,394 B2Granted
Wafer shipping container
AssigneeBrooks Automation, Inc.
InventorPatrick Rooney Conarro
Life of this patent
Estimating the term…
Abstract
A wafer shipping container has a first housing subcontainer. A second housing subcontainer mates with the first housing subcontainer to form a housing. The first housing subcontainer is substantially the same as the second housing subcontainer. A process carrier fits inside the housing.
Claims13
A wafer shipping container comprising:
- a housing having a top portion and a bottom portion;
- a process carrier having a top plate, a lower plate, a pair of side walls, and an open front side, the process carrier fitting inside the housing;
- and
- a film frame designed to slide inside the process carrier;
- wherein the process carrier has first kinematic registration members on the edges of the top and lower plates, the first kinematic registration members being rounded protrusions configured to register the process carrier in the housing, and second registration members for registering the process carrier to production equipment, and wherein the first kinematic registration members and second registration members are distinct and separate from one another.
2 more elements
A wafer shipping container comprising:
- a process carrier providing semiconductor processing equipment access at a front side and at a back side of the process carrier;
- the process carrier having a pair of guides that form a pair of side walls of the process carrier;
- and
- a housing containing and completely enclosing the process carrier, the housing having a first portion and a second portion;
- wherein the semiconductor processing equipment access at both the front and back side is sized and shaped for facilitating batch wafer transfer to and from the process carrier;
- and
- wherein the process carrier has a first kinematic registration system having rounded protrusions configured to register the process carrier to the housing, and a second registration system for registering the process carrier to production equipment, and wherein the first kinematic registration system and second registration system are distinct from one another and the second registration system comprises a kinematic coupling registration system for kinematic coupling of the process carrier to production equipment.
4 more elements
Dependencies are inferred from the claim text.