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US 7,674,671 B2Granted
Aerodynamic jetting of aerosolized fluids for fabrication of passive structures
AssigneeOptomec Design Company
InventorsMichael J. Renn, Marcelino Essien, Bruce H. King, Jason A. Paulsen
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Abstract
Method and apparatus for direct writing of passive structures having a tolerance of 5% or less in one or more physical, electrical, chemical, or optical properties. The present apparatus is capable of extended deposition times. The apparatus may be configured for unassisted operation and uses sensors and feedback loops to detect physical characteristics of the system to identify and maintain optimum process parameters.
Claims11
A method of depositing a passive structure comprising a material on a target, the method comprising the steps of:
- atomizing the material;
- entraining the atomized material in a carrier gas to form an aerosol;
- removing excess carrier gas from the aerosol using a flow controller;
- monitoring a pressure of said aerosol;
- surrounding the aerosol with a sheath gas and subsequently passing the aerosol through no more than one orifice;
- focusing the aerosol;
- and
- depositing the material entrained in the carrier gas on the target with a sub-millimeter deposition linewidth;
- wherein a tolerance of a physical or electrical property of the passive structure is better than approximately 5%.
6 more elements
Dependencies are inferred from the claim text.