Exposure apparatus and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorYoshihiro Morimoto
Life of this patent
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Abstract
An exposure apparatus configured to expose a substrate to light to transfer a pattern of a reticle onto the substrate includes a reticle stage configured to mount the reticle, a structure configured to support the reticle stage, a plurality of first supporting members configured to support the structure; and a second supporting member configured to support the structure outside an area formed by connecting the three first supporting members. The second supporting member includes a unit configured to dampen vibration of the structure.
Claims5
An exposure apparatus configured to expose a substrate to light to transfer a pattern of a reticle to the substrate, the exposure apparatus comprising:
- a reticle stage configured to mount the reticle;
- a structure configured to support the reticle stage;
- three first supporting members configured to support the structure at three places and constitute a kinematic mount;
- and
- a second supporting member configured to support the structure outside an area surrounding the three first supporting members, the second supporting member having a damper configured to dampen vibration of the structure,
- wherein the damper dampens vibration of the structure by driving a non-contact-type actuator.
A device manufacturing method comprising:
- exposing a substrate to light to transfer a pattern of a reticle onto the substrate using an exposure apparatus,
- wherein the exposure apparatus comprises:
- a reticle stage configured to mount the reticle;
- a structure configured to support the reticle stage;
- three first supporting members configured to support the structure at three places and constitute a kinematic mount;
- and
- a second supporting member configured to support the structure outside an area surrounding the three first supporting members, the second supporting member having a damper configured to dampen vibration of the structure,
- wherein the damper dampens vibration of the structure by driving a non-contact-type actuator.
Dependencies are inferred from the claim text.