Electrostatic chuck device

An electrostatic chuck device comprised of:

• a dielectric plate with an embossed surface comprising a projection and a depression,
• an electrode layer formed in the depression,
• an external power source for making the electrode layer in one of a state supplied with voltage and a grounded state, and
• a conductor layer formed on the projection, the conductor layer being insulated from the electrode layer,
• wherein a range where the conductor layer is formed is inside from a range of the surface of the projection.

An electrostatic chuck device comprised of:

• a dielectric plate with an embossed surface comprising a projection and a depression,
• an electrode layer formed in the depression,
• an external power source for making the electrode layer in one of a state supplied with voltage and a grounded state, and
• a conductor layer formed on the projection, the conductor layer being insulated from the electrode layer,
• wherein a range where the conductor layer is formed is inside from a range of the surface of the projection and the electrode layer is not formed around the projection.

An electrostatic chuck device comprising:

• a dielectric plate having a surface embossed to give a projection and a depression,
• an electrode,
• an external power source for applying a voltage to the electrode,
• first conductor wiring parts for covering substrate supporting surface of the projection, and
• second conductor wiring parts arranged on the depression,
• wherein the first conductor wiring parts and the second conductor wiring parts are electrically connected to make a conductor wiring, and both of the conductor wiring parts are connected to a switch for switching both of the conductor wiring parts between a grounded state and a floating state, and
• the switch is switched to be in the floating state when applying the voltage to the electrode, and is switched to be in the grounded state when the voltage to the electrode is stopped.

An electrostatic chuck device comprising:

• a dielectric plate with an embossed surface comprising a projection and a depression,
• an electrode layer formed in the depression,
• an external power source for making the electrode layer in one of a state supplied with voltage and a ground state, and
• a conductor layer formed on the projection, the conductor layer being insulated from the electrode layer,
• wherein a step of difference formed between the electrode layer and the conductor layer is in a range of 5 μm to 30 μm, and the conductor layer has a same electrical potential to a substrate when being contacted with the substrate.