Method for contaminant removal
AssigneeTexas Instruments Incorporated
InventorsErika Lee McFadden, Ronald Charles Roth, Lisa Ann Wesneski
Life of this patent
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Abstract
Method for removing contaminants from a surface during semiconductor fabrication. A preferred embodiment comprises developing a resist layer on a top surface of a semiconductor substrate, curing the developed resist layer, and cleaning the developed resist layer with a developer solution to remove contaminants. The cleaning makes use of the same developer solution used to develop the resist layer, so the cleaning makes use of a process that already exists and requires no additional investment to implement, while the curing stabilizes the developed resist layer so that the cleaning does not damage the developed resist layer.
Claims12
A method for fabricating an array of light modulators on a substrate, the method comprising:
- forming electrical addressing circuitry on the substrate;
- forming hinges over the electrical addressing circuitry;
- forming mirrors on each hinge, wherein forming the mirrors comprises:
- developing a resist layer formed over the hinges;
- curing the developed resist layer;
- cleaning the cured developed resist layer with a developer solution to remove contaminants;
- and
- depositing a mirror material over the cured developed resist layer.
A method for forming a display system, the method comprising:
- optically coupling an array of light modulators to a light source, wherein the array of light modulators creates images by setting each light modulator in the array to a state needed to properly display an image on a display plane by reflecting a light from the light source, wherein the array of light modulators is manufactured by
- forming electrical addressing circuitry on the substrate;
- forming hinges over the electrical addressing circuitry;
- forming mirrors on each hinge, wherein the mirror forming comprises
- developing a resist layer formed over the hinges;
- curing the developed resist layer;
- cleaning the cured developed resist layer with a developer solution to remove contaminants;
- depositing a mirror material over the developed resist layer;
- and
- coupling a controller to the array of light modulators, the controller issuing commands to control the operation of the array light modulators.
Dependencies are inferred from the claim text.