Apparatus and method for manufacturing a semiconductor device
AssigneeSpansion LLC
InventorYasuhiro Shinma
Life of this patent
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AssigneeSpansion LLC
InventorYasuhiro Shinma
Estimating the term…
An apparatus for manufacturing a semiconductor device includes an upper mold (21), a lower mold (22), and a plate (30, 130, 230) that includes at least one cavity (31) that receives resin and defines an outer shape and a thickness of a resin sealing portion, and a gate (32) through which the resin is guided to the cavity (31), the plate (30) being interposed between the upper mold (21) and the lower mold (22). The plate (130) further includes a resin film (132) fixed by viscoelastic or adhesive bonding to a side of thin plates (131) towards a substrate on which electrodes are provided. The semiconductor device is provided which has no resin burrs that occur on a substrate in an end portion of the molded body. The plate (30, 130, 230) is formed by multiple thin plates (231, 232, 233) joined by welding or positioned by positioning pins (237, 238).
An apparatus for manufacturing a semiconductor device comprising:
An apparatus for manufacturing a semiconductor device comprising:
A method of fabricating a semiconductor device comprising:
Dependencies are inferred from the claim text.