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US 7,612,969 B2Granted
Magnetic memory device and method of fabricating the same
AssigneeSamsung Electronics Co., Ltd.
InventorsSe-Chung Oh, Jang-Eun Lee, Hyun-Jo Kim, Kyung-Tae Nam, Jun-Ho Jeong
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Abstract
A magnetic memory device includes a pinning layer, a pinned layer, an insulation layer, which are sequentially stacked on a semiconductor substrate. The magnetic memory device further includes a free layer disposed on the insulation layer, a capping layer disposed on the free layer and an MR (magnetoresistance) enhancing layer interposed between the free layer and the capping layer. The MR enhancing layer is formed of at least one anti-ferromagnetic material.
Claims1
A magnetic memory device comprising:
- a pinning layer, a pinned layer, and an insulation layer sequentially stacked on a semiconductor substrate;
- a ferromagnetic free layer disposed on the insulation layer;
- a capping layer disposed on the ferromagnetic free layer;
- and
- an MR (magnetoresistance) enhancing layer interposed between and in direct physical contact with both the ferromagnetic free layer and the capping layer so as to prevent AFC (anti-ferromagnetic coupling) from occurring between the MR enhancing layer and the free layer, wherein the MR enhancing layer is formed of at least one anti-ferromagnetic material, wherein the MR enhancing layer is formed to a thickness of about 3 to about 10 Å using at least one material selected from the group consisting of iridium manganese (IrMn), platinum manganese (PtMn), and iron manganese (FeMn).
2 more elements
Dependencies are inferred from the claim text.