Optical device
AssigneeDenso Corporation
InventorsJunji Oohara, Yukihiro Takeuchi
Life of this patent
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Abstract
An optical device includes a silicon substrate, and multiple columnar members. The columnar members are integrally formed with the silicon substrate and stand on a top surface of the silicon substrate. The columnar members are made of silicon oxide. Light enters the columnar members in a first direction and propagates through the columnar members in a second direction. The columnar members extend in a third direction. The columnar members are arranged with a gap in the second direction. The second direction is perpendicular to the third direction. An angle between the first and third directions is greater than a critical angle and equal to or less than 90 degrees.
Claims19
An optical device comprising:
- a silicon substrate;
- and
- a plurality of columnar members integrally formed with the silicon substrate and standing on a top surface of the silicon substrate, the plurality of columnar members being made of silicon oxide,
- wherein light enters the plurality of columnar members in a first direction and propagates through the plurality of columnar members in a second direction,
- wherein the plurality of columnar members extend in a third direction,
- wherein an angle between the first and third directions is greater than a critical angle and equal to or less than 90 degrees,
- wherein the plurality of columnar members are arranged with a gap in the second direction, and
- wherein the second direction is perpendicular to the third direction.
An optical device comprising:
- a silicon substrate;
- and
- a plurality of columnar members integrally formed with the silicon substrate and standing on a top surface of the silicon substrate, the plurality of columnar members being made of silicon oxide,
- wherein light propagates through the plurality of columnar members in a first direction,
- wherein the plurality of columnar members extend in the first direction,
- wherein the plurality of columnar members are arranged with a gap in a second direction perpendicular to the first direction,
- wherein the light has a wavelength λ,
- wherein the silicon oxide has a refractive index N,
- wherein each columnar member has a width W in the second direction,
- wherein each columnar member has a length L in the first direction, and
- wherein
-
-
- L
- =
- N
-
- {
- W
- 2
- -
- (
- λ
- 2
- ×
- N
- )
- 2
- }
- λ
- .
An optical device comprising:
- a silicon substrate;
- and
- a plurality of columnar members integrally formed with the silicon substrate and standing on a top surface of the silicon substrate, the plurality of columnar members being made of silicon oxide,
- wherein light propagates through the plurality of columnar members in a first direction,
- wherein the plurality of columnar members extend in the first direction,
- wherein the plurality of columnar members are arranged with a gap in a second direction perpendicular to the first direction,
- wherein the light has a wavelength λ,
- wherein the silicon oxide has a refractive index N,
- wherein each columnar member has a width W in the second direction,
- wherein each columnar member has a length L in the first direction,
- wherein a correction value of the width W is δW,
- wherein
-
-
- L
- =
- N
-
- {
- (
- W
- +
- δ
-
-
- W
- )
- 2
- -
- (
- λ
- 2
- ×
- N
- )
- 2
- }
- λ
- ,
- and
- wherein
-
-
- δ
-
-
- W
- =
- -
- 1.05
-
- λ
- 2
- +
- 3.104
-
- λ
- -
- 1.707
- .
Dependencies are inferred from the claim text.