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US 7,612,932 B2Granted
Microelectromechanical device with optical function separated from mechanical and electrical function
AssigneeIdc, LLC
InventorsClarence Chui, Denis Endisch, Lior Kogut, Ming-Hau Tung, Yeh-Jiun Tung, Chih-Wei Chiang
Life of this patent
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Abstract
A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element includes a deformable layer and a reflective element. The actuation electrode is between the deformable layer and the reflective element.
Claims36
A microelectromechanical (MEMS) device comprising:
- a first reflective layer;
- a movable element over the first reflective layer, the movable element comprising a deformable layer and a reflective element;
- and
- an actuation electrode between the deformable layer and the reflective element, wherein a voltage applied to the actuation electrode generates a first attractive force in a first direction on a first portion of the movable element and generates a second attractive force in a second direction on a second portion of the movable element, the second direction substantially opposite the first direction, the first attractive force greater than the second attractive force, the movable element responsive to the first and second attractive forces by moving generally in the first direction.
1 more element
A microelectromechanical (MEMS) device comprising:
- a first reflective layer;
- a movable element over the first reflective layer, the movable element comprising a deformable layer and a reflective element;
- and
- an actuation electrode between the deformable layer and the reflective element, wherein a lower surface of the deformable layer contacts a stationary portion of the device when an actuation voltage is applied to the actuation electrode.
1 more element
A microelectromechanical (MEMS) device comprising:
- a first reflective layer;
- a movable element over the first reflective layer, the movable element comprising a deformable layer and a reflective element;
- and
- an actuation electrode between the deformable layer and the reflective element, wherein an upper surface of the reflective element contacts a stationary portion of the device when an actuation voltage is applied to the actuation electrode.
1 more element
Dependencies are inferred from the claim text.