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US 7,612,884 B2Granted
Method and arrangement for optical examination or processing of a sample
AssigneeCarl Zeiss Jena GmbH
InventorsRalf Wolleschensky, Michael Kempe
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AssigneeCarl Zeiss Jena GmbH
InventorsRalf Wolleschensky, Michael Kempe
Estimating the term…
A method and an arrangement for the optical examination and/or processing of a sample comprise an element for generating an illumination light, an element arranged downstream of the latter for spectral splitting of the illumination light for generating spatially separated spectral components, an element for parallelizing the split illumination light, an element for focusing the illumination light on or in the sample, wherein the spectral components are superposed, and an element for detecting the sample light, advantageously comprising an element for generating a short-pulse illumination light, an element arranged downstream of the latter for spectral splitting of the illumination light for generating spatially separated spectral components with pulse lengths that are greater than the pulse length of the illumination light, wherein these spectral components are combined again in the sample.
A method for the optical examination and/or processing of a sample, comprising the steps of:
An arrangement for the optical examination and/or processing of a sample, comprising:
An arrangement for the optical examination and/or processing of a sample, comprising:
Dependencies are inferred from the claim text.