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US 7,612,627 B2Granted
Integrated binary phase shift keying with silicon MEMS resonators
AssigneeInfineon Technologies AG
InventorsFlorian Schön, Wolfgang Raberg, Bernhard Winkler
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Abstract
A modulator includes a micro-electromechanical resonator device configured to receive an input signal and generate two output signals in response thereto, wherein the two signals having a predetermined phase relationship therebetween. The modulator further includes a switching system configured to selectively pass one of the two signals to an output of the modulator in an alternating fashion in response to phase modulation data.
Claims24
A modulator, comprising:
- a micro-electromechanical resonator device configured to receive an input signal and generate first and second output signals in response thereto, the first and second output signals having a predetermined phase relationship therebetween;
- and
- a switching system configured to selectively pass one of the first and second output signals to an output of the modulator in response to phase modulation data.
A micro-electromechanical resonator structure, comprising:
- a free standing resonator structure overlying a semiconductor substrate and anchored thereto;
- an input signal structure configured to receive an input signal and exert a force on the free standing resonator structure as a function thereof, thereby causing the free standing resonator structure to move;
- and
- an output signal structure configured to generate first and second output signals having a predetermined phase relationship therebetween as a function of the movement of the free standing resonator structure.
1 more element
A modulator, comprising:
- a micro-electromechanical resonating means operable to receive an input signal and generate first and second output signals having a predetermined phase relationship therebetween;
- and
- switching means operable to selectively pass one of the first and second output signals to an output of the modulator in response to a modulation data signal.
A method of modulating a signal, comprising:
- providing an input signal;
- moving a micro-electromechanical resonator structure as a function of the input signal;
- sensing a change in capacitance of a capacitive element as a function of the movement of the micro-electromechanical resonator structure;
- and
- generating an output signal as a function of the change in capacitance;
- wherein the output signal comprises two output signals having a predetermined phase relationship therebetween, and further comprising selectively passing the two output signals to a modulator output based on a state of a phase modulation signal.
3 more elements
Dependencies are inferred from the claim text.