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US 7,612,572 B2Granted
Probe and method of manufacturing a probe
AssigneeFujitsu Limited
InventorToshihiro Ishizuka
Life of this patent
Estimating the term…
Abstract
A probe 10 to be used when inspecting characteristics of an object of inspection includes: a bar-shaped base member 3 forming a main body; a nickel plating layer 4 constituting a ground layer and a gold plating layer 5 constituting an outermost layer formed on a surface of the base member 3; and a plurality of square-pyramidal 1 protrusions formed in a lattice-like fashion at one end of the base member 3 and brought into contact with the object of inspection.
Claims5
A probe to be used when inspecting electrical characteristics of an object of inspection, comprising:
- a bar-shaped base member forming a main body;
- a plating layer formed on a surface of the base member;
- a plurality of first protrusions formed at one end of the base member, first protrusions having a first height and being brought into contact with the object of inspection;
- a gold plating layer formed on a peak of the first protrusions;
- and
- a plurality of second protrusions formed at the one end of the base member, the second protrusions having a second height and being brought into contact with the object of inspection, the second height being less than the first height by a distance corresponding to a thickness of the gold plating layer.
3 more elements
A probe, comprising:
- a first conical/pyramidal protrusion at a forward end of the probe, the first conical/pyramidal protrusion has a first height and a peak of the first conical/pyramidal protrusion includes a gold plating layer;
- a second conical/pyramidal protrusion differing from the first conical/pyramidal protrusion at a forward end of the probe, the second conical/pyramidal protrusion has a second height and the second height differs from the first height by a distance corresponding to a thickness of the cold plating layer.
Dependencies are inferred from the claim text.