High-deformation composite microresonator
AssigneeCommissariat a l'Energie Atomique
InventorsAmyot Tripard, Yves Brechet
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Abstract
An electromechanical resonator including a vibrating body, at least one excitation electrode, and at least one detection electrode. The vibrating body includes a first part made of a first material with a first Young's modulus and a second part made of a second material with a second Young's modulus, less than the first Young's modulus, the second part being at least partially located facing the detection electrode.
Claims17
An electromechanical resonator comprising:
- a vibrating body;
- at least one excitation electrode and at least one detection electrode,
- wherein the vibrating body comprises a first part made of a first material with a first Young's modulus and a second part made of a second material with a second Young's modulus less than the first Young's modulus, the second part being located in a cavity of the first material and at least partially located facing the detection electrode.
A process for making an electromechanical resonator including a vibrating body itself including a first part made of a first material with a first Young's modulus, and a second part made of a second material with a second Young's modulus less than the first Young's modulus, at least one excitation electrode and at least one detection electrode, the second part of the vibrating body at least partially facing the detection electrode, the process comprising:
- etching at least one cavity in a base made of the first material with a first Young's modulus;
- and
- depositing the second material in the cavity with a second Young's modulus less than the first Young's modulus.
Dependencies are inferred from the claim text.