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US 7,612,381 B2Granted
Method for fabricating a semiconductor device and semiconductor device
AssigneeMeijo University
InventorsSatoshi Kamiyama, Hiroshi Amano, Motoaki Iwaya, Isamu Akasaki, Hideki Kasugai
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Abstract
The present invention discloses a method for fabricating a semiconductor device, comprising: providing a translucent portion; forming a covering layer comprised of one or more metals on the translucent portion by vapor deposition; providing kinetic energy to the covering layer for forming a periodic mask; forming a periodic structure on the translucent portion by using the periodic mask.
Claims1
A semiconductor device, comprising:
- a translucent portion having a first semiconductor layer that has a first side and a second side;
- the first side of the first semiconductor layer is comprised of a first uniformly distributed periodic structure;
- a light emitting portion that contacts the first side and is comprised of:
- a thin coating of low temperature deposition buffer layer deposited onto the first side that mimics and parallels the first uniformly distributed periodic structure;
- the low temperature deposition buffer layer includes a second buffer side that contacts the first side of the first semiconductor layer, forming a second uniformly distributed periodic structure;
- the low temperature deposition buffer layer further includes a first buffer side forming a third uniformly distributed periodic structure, with the first buffer side contacting a second cladding side of a cladding layer, with the second cladding side forming a fourth uniformly distributed periodic structure as a result of contact with the first buffer side of the low temperature deposition buffer layer;
- a light emitting layer that contacts a first cladding side of the cladding layer;
- a barrier layer that contacts the light emitting layer;
- a contact layer that contacts the barrier layer;
- a p-electrode that contacts the contact layer;
- and
- a n-electrode that contacts the second side of the first semiconductor layer;
- with the first, the second, the third, and the fourth uniformly distributed periodic structure having an effective refractive index that converges gradually towards a second refractive index from a first refractive index as light emitted advances and penetrates more deeply in a height direction of one uniformly distributed periodic structure towards another uniformly distributed periodic structure, which improves transmittance of light by suppressing variations in first and second refractive indexes;
- with light ultimately extracted from the second side of the first semiconductor layer.
11 more elements
Dependencies are inferred from the claim text.